Nanometrology and Instrumentation

Nanometrology is the science of measurement at the nanoscale level. Nanometrology has a crucial role in order to produce nanomaterials and devices with a high degree of accuracy and reliability nanomanufacturing. This reference provides following further explanations: Nanometrology includes length or size measurements where dimensions are typically given in nanometres and the measurement uncertainty is often less than 1nm as well as measurement of force, mass, electrical and other properties. They also pinpoint importance of nanometrology for the future of nanotechnologies: Nanotechnologies, however defined, cannot progress independently of progress in nanometrology.

According to the reference research-oriented nanometrology is well established in research institutes and in industry. However, implementation of industrial nanometrology is still facing a variety of problems. The main differences between those two nanometrology streams can be identified in the area of precision, cost/efficiency and parameter types and of course conditions in which measurement takes place.

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